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Excimer ArF laser 2kHz

2011-01-22 91 Dailymotion

In 1980, Arnold developed the excimer laser for the Canadian society PRA. <br /><br />The parculiarity of this laser is to be ultra compact and produce 2000 pulses per second. <br /><br />To obtain this performance, the laser consists of a barium titanate Blumlein line with corona preionization electrodes. <br /><br />A hydrogen thyratron switch is used for discharging the Blumlein line. <br /><br />A cooling of the gas mixture He/Ar/NF3 consists of a turbocharger driven by a variable frequency electric motor and an aluminum heat exchanger. <br /><br />The rotation speed is adjustable between 70,000 and 120,000 rpm. <br /><br />The output energy per pulse is 2 mJ at 2 kHz with a pulse duration of 12 ns. <br /><br />The wavelength is 193 nm

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